JPH0279035U - - Google Patents
Info
- Publication number
- JPH0279035U JPH0279035U JP15820388U JP15820388U JPH0279035U JP H0279035 U JPH0279035 U JP H0279035U JP 15820388 U JP15820388 U JP 15820388U JP 15820388 U JP15820388 U JP 15820388U JP H0279035 U JPH0279035 U JP H0279035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer cassette
- cassette
- light emitting
- sensor support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15820388U JPH0279035U (en]) | 1988-12-05 | 1988-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15820388U JPH0279035U (en]) | 1988-12-05 | 1988-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279035U true JPH0279035U (en]) | 1990-06-18 |
Family
ID=31438319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15820388U Pending JPH0279035U (en]) | 1988-12-05 | 1988-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279035U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016149501A (ja) * | 2015-02-13 | 2016-08-18 | 東京エレクトロン株式会社 | 基板検出装置、基板検出方法及び基板処理システム |
-
1988
- 1988-12-05 JP JP15820388U patent/JPH0279035U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016149501A (ja) * | 2015-02-13 | 2016-08-18 | 東京エレクトロン株式会社 | 基板検出装置、基板検出方法及び基板処理システム |